DEVICE FOR LASER-PLASMA SYNTHESIS OF HIGH-SOLID MICRO- AND NANOSTRUCTURED COATINGS Russian patent published in 2017 - IPC C23C16/48 C23C16/46 C23C16/54 

FIELD: chemistry.

SUBSTANCE: device comprises a pulse-periodic laser, a reaction chamber with a means for positioning the object to be processed with a control processor and an inlet for the working gas flow, a source of working gas, a means for forming a working gas flow in the reaction chamber, a means for delivering laser radiation to the reaction chamber and focusing the beam, heating the reaction zone while cooling the periphery of the reaction zone. The reaction chamber has an inlet for the working gas flow and an input for laser radiation. It comprises a local heating device comprising a fan with a heater installed in the nozzle or a gas burner or plasmatron forming a directional jet, at the periphery of which a liquid or sprayed cooling agent is supplied. The nozzle consists of an outer and inner annular nozzle.

EFFECT: invention allows to expand the technological capabilities by providing a synthesis of wear-resistant, impact resistant, chemical and corrosion resistant coatings, and to improve the coating quality by reducing the intensity of residual laser radiation.

2 cl, 1 dwg