METHOD TO PRODUCE ARRAYS OF ALIGNED CARBON NANOTUBES ON SUBSTRATE SURFACE Russian patent published in 2015 - IPC B82Y30/00 C23C16/26 C23C16/513 

FIELD: nanotechnologies.

SUBSTANCE: invention relates to technologies for production of arrays of carbon nanotubes on the substrate surface. In a reaction chamber they form a working gas flow, containing carrier gas, gaseous hydrocarbon and catalyst precursor for synthesis of carbon nanotubes. The flow of working gas is sent to the surface of the substrate with speed of 100-1000 m/s. Along the working gas flow they send infrared pulse laser radiation with frequency of pulses 5-100 kHz and pulse energy of 0.05-0.5 J for its activation and local heating of the substrate surface to 600-1000°C. The specified reaction chamber is moved above the substrate surface. In a particular case of invention realization they send a flow of inert gas onto the substrate surface, which screens the area of synthesis of carbon nanotubes from air, at its pressure exceeding the pressure of working gas flow.

EFFECT: invention provides for production of arrays of aligned carbon nanotubes on substrates having surfaces of large area - up to several square kilometres.

2 cl, 4 dwg, 1 ex