METHOD OF MANUFACTURING MICROTECHNICAL DEVICE IN VOLUME OF PHOTOUSTICAL GLASS PLATE Russian patent published in 2018 - IPC B81C1/00 C03B32/02 

FIELD: physics.

SUBSTANCE: invention relates to a method of manufacturing a microtechnical device in the volume of a photosensitive glass plate (PG). The method involves forming prototypes of local regions by moving a focused laser beam in the plane of creating pre-images of local regions, identifying prototypes of local regions with defects, amorphizing all the pre-images of local regions with defects, re-forming pre-images of local regions in each of the amorphized regions, processing until the appearance of local regions of the crystalline phase in the pre-images of local regions and etching the PG plate. Amorphization is carried out by a converging beam of CO₂ laser with an average power density in the neck of the beam of, at least, 7 W/cm² and not more than 18 W/cm² with a duration of exposure of 5 to 10 s and a waist size of 25 to 50 mcm. The thermal treatment is carried out by a converging beam of CO₂ laser with an average power density in the beam constriction of, at least, 1.5 W/cm² and not more than 3.0 W/cm² with a duration of exposure of 15 to 400 s and a waist size of 25 to 500 mcm.

EFFECT: shortening the duration of the process and increasing the yield of suitable products.

16 dwg