METHOD FOR MAKING HOLLOW 3D STRUCTURE INSIDE PHOTOSENSITIVE GLASS PLATE Russian patent published in 2016 - IPC C03C23/00 C03C15/00 

FIELD: glass.

SUBSTANCE: invention relates to making a hollow 3D structure inside a photosensitive glass plate. Prototype of future structure is created by movement of glass plate relative to the focused laser beam with ultrashort pulse length in the plane of forming a prototype of future structure. Structure is formed in the form of a continuous line defects with defect size of not more than 100 mcm and not less than 1 mcm to overlap section beam not less than 0.85 to 0.98 of defect size, radiation power density in the plane of forming a continuous line defects not lower than 5·10¹¹ W/cm² and not higher than 700·10¹¹ W/cm². Thermal treatment of plate with the prototype of future structure is divergent radiation beam CO₂ laser beam cross-section size on the surface of the plate exceeding 50 % of area of its surface, with density of average power radiation not less than 1.5 W/cm² and no more than 3.0 W/cm². Heat treatment duration of not more than 400 c and not less than 15 c. after thermal treatment is performed by chemical etching in water solution of HF with concentration of the solution not lower than 5 % and not more than 10 % at room temperature with the assistance of ultrasound to complete elimination of crystalline phase.

EFFECT: technical result consists in reduction of duration of making a hollow 3D structure in a glass plate, and increase in efficiency.

1 cl, 16 dwg