MICRO-DIAGNOSTIC DEVICE MANUFACTURING METHOD Russian patent published in 2020 - IPC B81C1/00 

FIELD: micro-diagnostic devices.

SUBSTANCE: invention can be used for making micro-diagnostic devices. Substance of invention consists in fact that method of micro-diagnostic device manufacturing consists in formation of each partitions at combination of plane of minimum cross-section of laser beam at energy level 1/e², section diameter of which 2ω₀ is determined from expression where ω₀ is radius of minimum cross-section of laser beam by energy level 1/e², M is beam quality, λ is radiation wavelength, NA is a numerical aperture of the lens, and with a plane spaced from the rear surface of the plate by a distance not less than in which, moving the plate relative to the region of minimum cross-section of laser beam 2ω₀ for entire length of micro-diagnostic device by one of X or Y coordinates, forming a first sealing line included in a plurality of sealing lines constituting the partition, and further, displacing plane with minimum cross-section of laser beam in direction towards upper surface of plate on coordinate Z at distance not less than and not more than and minimum laser beam cross-section area 2ω₀ is shifted, respectively, by one of the coordinates Y or X at a distance not less than 0.5⋅2ω₀ and not more than 1.0⋅2ω₀, and moving plate relative to region of minimum cross-section of laser beam 2ω₀ to entire length of micro-diagnostic device on same coordinate, on which formed sealing line, and then, multiple alternating shift of plane of minimum cross-section of laser beam 2ω₀ in direction to upper surface of plate in coordinate Z, and area of minimum cross-section of laser beam 2ω₀ by Y or X coordinate with plate displacement relative to region of minimum cross-section of laser beam 2ω₀ with movement for entire length of micro-diagnostic device, in compliance with limitations on formation of sealing lines, partition is formed. Last sealing line in the partition is formed in a plane spaced from the surface of the plate by a distance not less than and not more than and performed with laser radiation pulse duration of not more than 300 femtoseconds at pulse repetition frequency of not less than 500 kHz with energy density of not less than 8⋅10³ J/cm² and not more than 15⋅10³ J/cm² at plate displacement speed relative to focused laser beam of not less than 0.4 mm/s and not higher than 2.5 mm/s, wherein a porous silicate glass plate is used, an outer part of each of the partitions on each of the surfaces of which after completing the formation of all partitions of the, forming a sealing regions with a size, exceeding the size of the partition wall by not more than 1.2 times by moving the plate relative to the focused on its surface beam of continuous radiation of the CO₂-laser with power density of not less than 2.8⋅10⁴ W/cm² at scanning speed of not less than 0.1 mm/s and not more than 0.5 mm/s.

EFFECT: possibility of complete elimination of interaction of micro-diagnostic device matrix material with diagnosed substance while maintaining possibility of matrix multiple use, as well as elimination of both preliminary and subsequent stages of micro-diagnostic device matrix processing.

1 cl, 28 dwg