FIELD: physics.
SUBSTANCE: in a method for perforating holes in the electrodes of ion-optical system, based on the formation of ion beams and their subsequent impact onto the surface of the electrode, ion-optical system including an emission electrode is collected before exposing the ion beams onto the surface, then a discharge is formed, creating a flow of ions and directing it through the holes of the emission electrode on the processed surface of the electrode, where the ions are sprayed to the electrode material at the points of exposure.
EFFECT: simplification of alignment between the holes in the electrodes when assembling the ion-optical system.
4 dwg
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Authors
Dates
2018-01-19—Published
2016-05-04—Filed