FIELD: electricity.
SUBSTANCE: device for stationary generation of ion beam contains body with removable upper flange with high-voltage bushing for power and cooling supply with gas discharge chamber, electrodes of ion-optical system, and insulators located in it. The device contains a reference platform, mounted on the upper flange, with vertical supporting insulators mounted on it, on which gas discharge chamber is installed, and an adjuster with grounded and intermediate electrodes of ion-optical system mounted on it.
EFFECT: increasing the reliability of stationary operation of the ion source during long-term operation under the conditions of inevitable presence of impact loads.
1 dwg
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