METHOD OF THE KELVIN-VOIGT MODEL COEFFICIENTS DETERMINING FOR THE MICRO-MECHANICAL RESONATOR ADHESIVE CONNECTION WITH THE BASE Russian patent published in 2018 - IPC G01H13/00 

FIELD: measuring equipment.

SUBSTANCE: present invention relates to the field of micromechanics and measurement equipment, in particular to micromechanical resonators. Method of the Kelvin-Voigt model coefficients determining for of a micromechanical resonator with a base adhesive connection, consisting in measuring of the micromechanical resonator resonance frequency and quality factor. At that, the micromechanical resonator resonant frequency and quality factor are measured at least twice, wherein the first time they are measured after the micromechanical resonator manufacturing within the silicon plate, and the second one is after the micromechanical resonator connection with the base, at that, the coefficients are determined by the constructed dependences of the micromechanical resonator transfer function modulus maximum values, calculated for different values of the Kelvin-Voigt model coefficients, and the frequency corresponding to these maximum values.

EFFECT: technical result is an increase in the accuracy of the Kelvin-Voigt model coefficients determining.

1 cl, 3 dwg