DEVICE FOR CREATION OF MULTI-MODAL STRUCTURE BY METHOD OF LASER INTERFERENCE LITHOGRAPHY Russian patent published in 2018 - IPC G03F7/20 

FIELD: manufacturing technology.

SUBSTANCE: invention relates to the field of photomechanical manufacturing of textured surfaces and relates to a device for production of a multimodal structure on the surface of a sample by the laser interference lithography method. Device is made on the basis of Lloyd's interferometer and includes a holder for placing the original sample, a reflector mounted relative to the holder with the possibility of forming an interference pattern on the sample surface. Reflector comprises at least one triangular prism made of an optically transparent material or a translucent plane-parallel plate and a reflective surface, which is located on the side of the back, the farthest from the holder, the prism edge or the plate back surface.

EFFECT: technical result consists in providing the possibility of a multi-periodic structure forming in one direction for one exposure.

8 cl, 5 dwg