DEVICE FOR CREATION OF MULTI-MODAL STRUCTURE BY METHOD OF LASER INTERFERENCE LITHOGRAPHY Russian patent published in 2018 - IPC G03F7/20 

Abstract RU 2654318 C1

FIELD: manufacturing technology.

SUBSTANCE: invention relates to the field of photomechanical manufacturing of textured surfaces and relates to a device for production of a multimodal structure on the surface of a sample by the laser interference lithography method. Device is made on the basis of Lloyd's interferometer and includes a holder for placing the original sample, a reflector mounted relative to the holder with the possibility of forming an interference pattern on the sample surface. Reflector comprises at least one triangular prism made of an optically transparent material or a translucent plane-parallel plate and a reflective surface, which is located on the side of the back, the farthest from the holder, the prism edge or the plate back surface.

EFFECT: technical result consists in providing the possibility of a multi-periodic structure forming in one direction for one exposure.

8 cl, 5 dwg

Similar patents RU2654318C1

Title Year Author Number
DEVICE FOR PRODUCING PERIODIC STRUCTURES BY LASER INTERFERENCE LITHOGRAPHY USING LASER WITH TUNABLE WAVELENGTH 2015
  • Balashov Igor Sergeevich
  • Grunin Andrej Anatolevich
  • Fedyanin Andrej Anatolevich
  • Chetvertukhin Artem Vyacheslavovich
RU2629542C2
METHOD OF PRODUCING THREE-DIMENSIONAL OPTICAL MICROSTRUCTURES WITH REFRACTION INDEX GRADIENT USING TWO-PHOTON LITHOGRAPHY 2023
  • Sharipova Margarita Ilgizovna
  • Baluyan Tigran Grigorevich
  • Bessonov Vladimir Olegovich
  • Fedyanin Andrej Anatolevich
  • Sharipova Margarita Ilgizovna
RU2826645C1
METHOD OF SCANNING DILATOMETRY AND DILATOMETER FOR ITS IMPLEMENTATION 2020
  • Khodunkov Vyacheslav Petrovich
RU2735489C1
ANGLE REFLECTOR 2011
  • Sokolov Andrej Leonidovich
  • Sadovnikov Mikhail Alekseevich
  • Shargorodskij Viktor Daniilovich
  • Murashkin Vjacheslav Vladimirovich
RU2458368C1
METHOD OF DILATOMETRY 2014
  • Gol'Dshtejn Robert Veniaminovich
  • Kozintsev Viktor Mikhajlovich
  • Podlesnykh Aleksej Viktorovich
  • Popov Aleksandr Leonidovich
  • Solodovnikov Sergej Ivanovich
  • Cheljubeev Dmitrij Anatol'Evich
RU2559797C1
DEVICE FOR DETERMINING OPTICAL ABSORPTION LOSSES IN THIN FILMS 2008
  • Vol'Pjan Oleg Dmitrievich
  • Kurjatov Vladimir Nikolaevich
  • Obod Jurij Aleksandrovich
  • Jakovlev Petr Petrovich
RU2377542C1
DEVICE FOR CHECKING SMALL ANGULAR ROTATIONS 1993
  • Aref'Ev A.A.
  • Kanashkin R.O.
RU2044271C1
METHOD AND SYSTEM FOR PRECISION ADDITIVE PRINTING OF THREE-DIMENSIONAL STRUCTURES (EMBODIMENTS) 2021
  • Baluyan Tigran Grigorevich
  • Bessonov Vladimir Olegovich
  • Fedyanin Andrej Anatolevich
  • Sharipova Margarita Ilgizovna
RU2796486C1
METHOD OF MEASUREMENT OF ANGLES OF TURN OF SEVERAL OBJECTS AND DEVICE FOR ITS IMPLEMENTATION 1993
  • Aref'Ev A.A.
  • Ivanov A.A.
  • Shereshev A.B.
RU2075727C1
METHOD AND SYSTEM FOR PRECISION ADDITIVE PRINTING OF THREE-DIMENSIONAL STRUCTURES 2022
  • Baluyan Tigran Grigorevich
  • Bessonov Vladimir Olegovich
  • Fedyanin Andrej Anatolevich
  • Sharipova Margarita Ilgizovna
RU2804779C1

RU 2 654 318 C1

Authors

Balashov Igor Sergeevich

Grunin Andrej Anatolevich

Petrov Aleksandr Kirillovich

Fedyanin Andrej Anatolevich

Chetvertukhin Artem Vyacheslavovich

Sharipova Margarita Ilgizovna

Dates

2018-05-17Published

2016-12-30Filed