DEVICE FOR PRODUCING PERIODIC STRUCTURES BY LASER INTERFERENCE LITHOGRAPHY USING LASER WITH TUNABLE WAVELENGTH Russian patent published in 2017 - IPC G03F7/20 

Abstract RU 2629542 C2

FIELD: physics.

SUBSTANCE: device includes a laser radiation source, a slit diaphragm, a beam expander, and a sample holder with a mirror mounted thereon. A laser with a tunable wavelength is used as the laser radiation source. The beam expander consists of the collecting and diffusing lenses. The cutting line of the slit diaphragm is parallel to the intersection line of the mirror planes and the sample holder.

EFFECT: simplifying the device and increasing the reliability thereof.

2 cl, 2 dwg

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RU 2 629 542 C2

Authors

Balashov Igor Sergeevich

Grunin Andrej Anatolevich

Fedyanin Andrej Anatolevich

Chetvertukhin Artem Vyacheslavovich

Dates

2017-08-29Published

2015-11-10Filed