METHOD AND DEVICE FOR DIFFERENTIAL DETERMINATION OF THE RADIUS OF CURVATURE OF LARGE-SIZED OPTICAL PARTS USING THE WAVEFRONT SENSOR Russian patent published in 2018 - IPC G01B11/255 G01M11/02 

FIELD: optics.

SUBSTANCE: method comprises setting an initial position for the reference mirror 1.2 with the known radius of curvature R_ref, which corresponds to the coincidence of its center of curvature with the focus point of the optical nozzle 2 on the optical axis of the single unit including the optical nozzle 2, the optical system 3 and the wavefront sensor 4. Optical nozzle 2 receives the spherical wavefront, which is reflected from the reference mirror 1.2 with the radius of curvature equal to the focal length ƒ_n of the optical nozzle 2. After the optical nozzle and the optical system, the flat wavefront comes to the wavefront sensor 4. By means of a small displacement Δ_ref a single block along the optical axis is used to determine the radius of curvature of the wave front R_dwf, coming to the wavefront sensor 4, after which the initial installation for the controlled part 1.1 with the radius R₃ is carried out, the above described operations are performed, the amount of movement of a single unit Δ₃ is determined, at which the wavefront sensor 4 receives the spherical wavefront with the radius of curvature R_dwf, and the radius of curvature of the controlled part R₃.

EFFECT: increased accuracy of determining the radius of curvature of the controlled surface.

3 cl, 1 dwg, 1 tbl