FIELD: metrology.
SUBSTANCE: invention relates to the metrology, in particular, to the vibration sensors. Device contains sensitive elements, measuring electronic section containing receiving circuit, excitation circuit, and interface circuit. Excitation circuit contains an analog input filter, an analog output filter, an open excitation circuit containing an analog-to-digital converter, a phase detector, and the signals generator. According to the first embodiment of the method, exciting the oscillating element at the first frequency with the first excitation signal, exciting the oscillating element at the second frequency with the second excitation signal, determining the first non-resonant frequency and the second non-resonant frequency using the excitation signal first and second frequencies. According to the second embodiment, exciting the oscillating element at the first and second frequencies, measuring the first and second phase differences, determining the non-resonant oscillations first phase difference and the non-resonant oscillations second phase difference using the first phase difference and the second phase difference.
EFFECT: acceleration of the measurement process and increase in the measurement accuracy.
16 cl, 10 dwg
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Authors
Dates
2018-12-11—Published
2015-03-03—Filed