MULTIOXIDE GAS-ANALYTIC CHIP AND METHOD FOR PRODUCTION THEREOF BY ELECTROCHEMICAL METHOD Russian patent published in 2019 - IPC G01N27/12 B82B1/00 B82B3/00 

FIELD: measuring equipment.

SUBSTANCE: group of inventions relates to gas analysis, specifically to devices for recognizing composition of multicomponent gas mixtures and methods for their production. Multi-oxide gas analytical chip consists of a dielectric substrate on the front side of which there is a set of coplanar strip electrode made from noble metal and thin-film thermistors, and on the reverse side is a system of thin-film meander-type heaters, wherein as gas-sensitive materials between strip electrodes used are nanostructures of oxides of zinc, manganese, cobalt and nickel, successively deposited electrochemically on different strip electrodes of multi-electrode chip, which collectively form a line of chemoresistive elements operating in the temperature range from 200 °C to 250 °C, in which resistance is changed under effect of impurities of organic vapors in ambient air. Process of electrochemical synthesis of oxides of zinc, manganese, cobalt and nickel is carried out in a vessel filled with an aqueous electrolyte and containing a counter electrode and a comparison electrode.

EFFECT: technical result of the claimed group of inventions consists in creation of a highly selective multi-oxide gas analytical chip with low prime cost.

7 cl, 7 dwg