METHOD OF MANUFACTURING A CHEMORESISTOR BASED ON NANOSTRUCTURES OF MANGANESE OXIDE BY ELECTROCHEMICAL METHOD Russian patent published in 2019 - IPC H01L21/3205 B82B1/00 

FIELD: technological processes.

SUBSTANCE: use for the manufacture of gas sensors chemoresistive type. Essence of the invention lies in the fact that the method of manufacturing a chemoresistor based on nanostructures of manganese oxide in the framework of the electrochemical method includes a container equipped with a reference electrode and an auxiliary electrode filled with an electrolyte containing nitrate anions and manganese cations, manganese oxide nanostructures are deposited on a dielectric substrate equipped with strip electrodes acting as a working electrode by applying a constant electric potential to the working electrode from -0.5 V to -1.1 V relative to the reference electrode for 5–20 minutes and at an electrolyte temperature in the range of 20–40 °C, after which the substrate with a precipitated layer of manganese oxide nanostructures is washed with distilled water and dried at room temperature.

EFFECT: providing the possibility of creating a chemoresistor based on manganese oxide nanostructures in a one-step process.

7 cl, 6 dwg