ANALYTICAL GAS MULTISENSOR CHIP BASED ON ZnO AND METHOD FOR ITS MANUFACTURING BASED ON SOL-GEL TECHNOLOGY Russian patent published in 2023 - IPC G01N27/12 

FIELD: sensor technology; nanotechnology.

SUBSTANCE: development of chemoresistive-type multi-sensor lines used for selective gas detection. The method for manufacturing a gas-analytical multisensor chip based on zinc oxide with a hierarchical structure includes forming a set of coplanar strip electrodes made of noble metal, a nanostructured layer of zinc oxide, thin-film thermistors and heaters on the front side of the dielectric substrate. The method differs in that a layer of zinc oxide with a hierarchical structure is formed within the framework of the sol-gel technology in three stages: at the first stage (1) a film-forming zinc oxide sol is prepared, which matures for 24 hours, at the second stage (2) a film-forming sol in in form of a microdrop is applied to the front side of the substrate and it is dried at a temperature of 90°C for 60 min, at the third stage (3) the operation of thermal annealing is carried out at a temperature of 550°C for 30 min or the operations of combined low-temperature annealing at a temperature of 160°C and UV photoannealing for 90 min are carried out.

EFFECT: invention makes it possible to manufacture an analytical gas multisensor chip at low cost that operates efficiently at a temperature of 300°C, capable of selectively detecting organic vapors.

1 cl, 9 dwg, 1 ex