METHOD FOR INCREASING UPPER LIMIT OF PRESSURE MEASUREMENT THERMIONIC PRESSURE GAUGE Russian patent published in 2019 - IPC G01L21/30 G01L21/12 

FIELD: measuring equipment.

SUBSTANCE: invention relates to vacuum measurement equipment and can be used in creation of thermionic electronic pressure gauges with measurement range from atmospheric pressure to 10^-8 Pa using an ion gage head. Disclosed is a method of increasing upper pressure measurement limit of thermionic pressure gauges with ion gage head with rectilinear cathode. According to the disclosed method in order to expand the upper limit of measuring gas pressure to atmospheric pressure, switching of the ion gage head to the mode of a thermal gage head (Pirani pressure gauge) is used, realized by applying cathode voltage to the filament in the form of periodically following rectangular pulses and determining the filament current integral over time during the voltage pulse duration. Pressure measure used is informative parameter X=(I_p-I₀)/(I_m-I₀), where I_p is cathode glow integral of time over pulse duration at current pressure, I₀ is cathode glow integral of time for pulse duration at pressure below 0.133 Pa, I_m is the cathode glow integral over time during the pulse action at atmospheric pressure, and value of parameter X is transferred to pressure value from calibration dependence of parameter X on gas pressure obtained previously together with values I_m and I₀ for used type of ion gage head, note here that voltage is not supplied to other electrodes of ion gage head.

EFFECT: higher upper limit of gas pressure measurement to atmospheric pressure.

3 cl