FIELD: measuring equipment.
SUBSTANCE: use: for measuring high and ultrahigh vacuum. Essence of the invention lies in the fact that the ionization manometer of the orbitron type contains a cylindrical anode placed in a cylindrical body at one end thereof, having a positive potential of about several hundred volts, a cylindrical collector of ions with zero potential, in which said cylindrical anode is placed coaxially, and having a length several times greater than its diameter, a thermionic cathode having a positive potential which is lower than the anode potential and is about several tens of volts, made in the form of a piece of wire and placed parallel to the axis of the anode at a distance from the surface of the anode in the radial direction equal to the length of the thermionic cathode and an electric shield, having a cathode potential located between the anode and the cathode, the electric shield is made in the form of a metal jar surrounding the thermionic cathode and located coaxially with it, so that the bottom of the cup faces the housing tube, and a slit opening is formed on the side surface of the jar for electron liberation, preferably in azimuth direction with respect to the anode axis, wherein one end of the cathode is electrically connected to the bottom of the metal jar and, on the opposite side, the jar is closed by a dielectric disc with an opening through which the traverse is electrically connected to the other end of the cathode.
EFFECT: technical effect: providing the possibility of extending the measurement limits towards low pressures, as well as reducing the measurement error.
1 cl, 3 dwg
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SU449267A1 |
Authors
Dates
2018-03-29—Published
2016-12-30—Filed