ION GAGE HEAD Russian patent published in 2018 - IPC H01J41/04 G01L21/32 

FIELD: measurement technology.

SUBSTANCE: invention relates to the high and ultrahigh vacuum measurement equipment and can be used in creation of ionization vacuum meters with measurement limits from 1 Pa to 10^-11 Pa. Ion gage head contains axially and sequentially located disk screen, thermal cathode, cylindrical accelerating electrode, additional accelerating electrode axially located with a gap from the accelerating electrode and electrons disk collector located after the additional accelerating electrode, as well as a cylindrical ions collector covering the gap between the accelerating electrodes, and surrounding the electrodes cylindrical magnet, creating axial magnetic field with induction greater than the critical one. Emerging from the thermal cathode electrons are accelerated by two cylindrical electrodes located with a gap to the energy sufficient for the gas molecules ionization. However, due to the axial magnetic field presence, they do not fall on these electrodes and are collected by the electrons collector, which is under the potential much less than the accelerating electrodes potentials. This provides the background current suppression due to the electrons deceleration radiation and positive ions desorption. Formed in the gap between the accelerating electrodes positive ions are collected by the covering the gap between accelerating electrodes cylindrical ions collector, creating proportional to the gas pressure collector current.

EFFECT: measured gas pressure range expansion in the ultrahigh vacuum area and reduction of measurement error.

1 cl, 4 dwg