FIELD: physics.
SUBSTANCE: use: to determine dielectric permeability and thickness of multilayer solid samples on metal surface. Essence of the invention consists in the fact that the method consists in creation of UHF electromagnetic field of traveling surface wave of type E above surface of dielectric-metal in single-mode mode, measurement on the normal to dielectric-metal surface of the attenuation coefficient and determining the relative dielectric permeability of the coating e and its thickness b, additionally excite surface electromagnetic waves of the E-type in series at 2N-wavelengths, N is number of layers of coating, attenuation factor of each surface electromagnetic wave is measured, based on measurement results is system of 2N-dispersion equations, and relative dielectric permeability εn, εn+1, …, εN and thickness bn, bn+1, …, bN layers of multilayer coating are determined by solving this system.
EFFECT: possibility of increasing accuracy and reliability of measurement of dielectric permeability and thickness of multilayer dielectric coatings at their selective control with obtaining information on each layer separately.
1 cl, 3 dwg, 1 tbl
