FIELD: acoustics; microelectronics.
SUBSTANCE: invention relates to measurement of acoustic waves, and more specifically to microelectronic devices for measuring acoustic velocity of particles. Measuring transducer of acoustic velocity of particles comprises heat-sensitive strips arranged in parallel to each other with contact sites on ends, arranged in fluid medium of acoustic waves propagation in recess of structural-forming chip, It differs by the fact that at least one monolithic support with the above chip is connected to the said recess so that it can be wrapped by said fluid medium adjoining said heat-sensitive strips and receiving mechanical loads of said heat-sensitive strips.
EFFECT: technical result is simultaneous increase of signal to noise ratio, sensitivity and mechanical strength of transducer of acoustic velocity of particles at audible audio frequencies.
3 cl, 1 dwg
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Authors
Dates
2019-08-15—Published
2018-12-03—Filed