DEVICE MEASURING VELOCITY OF GAS FLOW AND PRESSURE DIFFERENCE Russian patent published in 1997 - IPC

FIELD: various branches of industry, medicine and research. SUBSTANCE: device measuring velocity of gas flow and pressure difference has microelectronic hotwire anemometer composed of heat-sensitive and heated elements arranged on dielectric film made from silicon nitride covering recess in silicon substrate microelectron not-wire anemometer is fixed in specified position in package base, it is connected by conductors to electric terminals. Conduit with inlet and outlet for passages of gas flow through microelectron hot-wire anemometer is formed in cover of package. Novelty of invention lies in making of recess covering conductors and isolated from conduit for passage of gas flow in cover of package. Recess in silicon substrate has through outlet to back side of substrate. Dielectric film covering recess is continuous and has uninterrupted contact with silicon substrate over perimeter of recess. EFFECT: facilitated manufacture, expanded application field. 6 cl, 3 dwg