METHOD OF CALIBRATING LASER THICKNESS GAUGE Russian patent published in 2019 - IPC G01B11/06 

FIELD: physics.

SUBSTANCE: laser thickness gauge is additionally equipped with calibration device. Calibration device is rigidly fixed by a pin-like screw connection on the thickness gauge housing, which provides perpendicularity of laser radiation beams to the reference position plane, and comprises a control board, linear step motor for reference displacement t_etj, fixed in measurement zone on common base with photoelectric modules. When calibrating reference - t_etj discretely move to other boundary of measurement zone and for each position of reference t_etj, 1<i<N, where N is the number of measurements, fixing the elements n_1i, n_2i corresponding to this position on linear multi-element photodetectors. Presented sequence of operations is repeated for all standards 1<j<M. To determine calibration coefficients k₁, k₂, g₁, g₂, C method of least squares is used, which minimizes measurement error of current thickness t_i relative to reference thickness t_etj.

EFFECT: technical result is reduction of measurement error.

3 cl, 2 dwg