FIELD: physics.
SUBSTANCE: method of measuring thickness involves directing a radiation beam from two sides perpendicular the displacement plane of the controlled article. First, in calibration mode of the thickness measuring device, the range of thickness measurements is given by measuring coordinates of light spots which correspond to maximum and minimum reference values of the measured thickness. Further, in thickness measurement mode, coordinates of the light spots are measured by performing integral estimation of the position and size of light spots on each photodetector. Radiation sources, photodetectors and optical systems are rigidly mounted on a common base. The drive can continuously move the controlled article. The process and control unit has a synchronising generator, a mode selector configured to select the mode of measuring thickness or mode of calibrating the thickness measuring device, a measurement result computer, a unit for integral estimation of the position and size of light spots on photodetectors and a measurement results display panel.
EFFECT: high accuracy of measuring thickness in the presence of destabilising factors of the production process and possibility of measuring thickness of controlled articles without slowing down the production process.
4 cl, 9 dwg
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Authors
Dates
2011-05-20—Published
2009-07-08—Filed