FIELD: measuring equipment.
SUBSTANCE: invention relates to measurement equipment, to measuring devices characterized by optical measuring devices, and can be used for measurement of decentering of optical elements, including those made of materials for infrared (IR) spectral region, opaque in visible spectrum, and aspherical ones. Autocollimation device for alignment of optical elements, which is installed on the adjustment table, comprises a laser placed on the optical axis along the beam in the forward direction beam splitter and forming a lens installed with possibility of movement along the optical axis, a centering cartridge for adjustment of the controlled optical element, a microlens, installed in reverse motion behind the forming lens after the beam splitter, and a matrix photodetector placed in the image plane of the microlens and connected to the computer. Note here that laser is arranged in the form of a point source shaped shaper made of micro lens, micro diaphragm and image transfer system. Besides, the beam splitter is made in the form of a mirror with a hole, and between the microlens and the matrix photodetector device there is additionally installed a double image unit, the laser is made by multimode semiconductor, operating in infrared range; at that, the microlens is made with possibility of linear movement along the optical axis.
EFFECT: high sensitivity of determining decentering of optical elements from infrared materials.
1 cl, 5 dwg
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Authors
Dates
2019-11-05—Published
2019-03-14—Filed