COMPOSITION FOR REMOVING POLYIMIDE MATERIAL Russian patent published in 2020 - IPC C09K13/02 H01L21/312 

Abstract RU 2711532 C1

FIELD: instrument engineering.

SUBSTANCE: invention relates to instrument making, in particular to compositions for removal of imidised polyimide varnish from articles. Etching composition of the polyimide material contains an organic amine and consists of dimethylsulphoxide (DMSO), dimethylformamide (DMFA). Organic amine is polyethylene polyamine (PEPA). Composition contains components of the following ratio of volume fractions: dimethylsulphoxide – 0.9–1.2; dimethylformamide – 0.9–1.2; polyethylene polyamine – 0.7–0.9.

EFFECT: invention enables to reduce the time for removing the imidised polyimide coating from the surface of articles without mechanical action and using high temperatures.

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RU 2 711 532 C1

Authors

Savchenko Evgenij Matveevich

Esipova Valentina Borisovna

Egupova Margarita Aleksandrovna

Sidorov Vladimir Alekseevich

Chuprunov Aleksej Gennadevich

Maskalets Yana Sergeevna

Dates

2020-01-17Published

2019-07-04Filed