FIELD: medicine; technological processes.
SUBSTANCE: invention relates to methods of applying calcium phosphate coatings and can be used in medicine when making implants with bioactive coating. Method involves spraying a target containing at least one calcium phosphate compound in high-frequency discharge plasma in a vacuum chamber of a magnetron sputtering system, in an argon atmosphere, onto samples placed on a substrate both in the target erosion zone and outside the target erosion region. At that, at least one sample is placed on the rotary table of the vacuum chamber at distance of 70–90 mm from the lower plane of the target, wherein the target is made from calcium phosphate compounds selected from: hydroxylapatite, and/or ion-substituted hydroxyapatites, and/or tricalcium phosphate, and/or ion-substituted tricalcium phosphate, and/or tetracalciumphosphate, and/or bio glass. Coating is formed as follows: vacuum chamber is evacuated to residual pressure not higher than 6.0*10-4 Pa, then filled with argon and brought to working pressure (5.0–12.0)*10-2 Pa, ion cleaning of sample is carried out for 5–10 minutes, placing it in the ion source zone; at working pressure (1.3–4.0)*10-1 Pa, high-frequency magnetron discharge at 50 W power is fired, followed by stepped through interval of 50 W power rise to 300 W and holding for 10 minutes at each step; high-frequency magnetron sputtering of the coating from the target is carried out by bringing the working vacuum to value of (9.0–12.0)*10-2 Pa by inserting the sample into the magnetron zone and holding in that position for 2–10 hours.
EFFECT: higher efficiency, as well as acceleration and simplification of the process.
8 cl, 12 ex, 1 dwg
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Authors
Dates
2020-02-25—Published
2019-11-18—Filed