FIELD: optical inspection.
SUBSTANCE: invention relates to optical inspection. Device for optical inspection of surface comprises: at least two radiation sources with different position and direction of emission; at least one of aperture and radiation-absorbing box, configured to block radiation, other than radiation scattered on surface; at least one chamber; and a processor comprising a trained classifier based on artificial intelligence and configured to: perform preprocessing of images, where preprocessing includes at least background removal, detect defect on at least one surface, where defect is detected on at least one surface, if at least one image from said set of images displays scattered radiation; determine the defect type, and whether the defect is false or true, by evaluating the detected defect by the trained classifier based on artificial intelligence. Determination whether the defect is false or true is performed based on a certain type of defect.
EFFECT: invention increases accuracy of determining defects.
26 cl, 6 dwg
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Authors
Dates
2020-03-11—Published
2019-08-27—Filed