DEVICE AND METHOD FOR FORMATION OF MULTICHARGED ION BEAMS Russian patent published in 2020 - IPC H01J27/22 H01J37/08 

FIELD: acceleration equipment.

SUBSTANCE: invention relates to the field of accelerating equipment and can be used for formation of beams (flows) of low-energy two- and triple-charged ions of alkali-earth and rare-earth metals in installations for ion implantation and lithography, microprobe analysis, in ion-beam devices for surface modification, as well as in development of quantum computers and atomic clocks. Device comprises a detachable emitter unit consisting of a cylindrical base, which serves as a cathode electrode and made of metal with good electrical and heat conductivity, for example copper, with flat ends, one of which is successively coated with a thin film of working substance - alkali-earth or rare-earth metal, thin film of solid electrolyte based on Na-β''-Al₂O₃ ceramics, in which Na⁺ ions are substituted with double- or trivalent mobile ions of working substance, and thin film of porous conductive material, for example carbon, which acts as anode electrode, and ohmic heater located from another end of solid-state reservoir. Method of forming beams of multicharged ions consists in formation of double-charged ions of alkali-earth metals or triply-charged ions of rare-earth metals due to redox reactions at boundary "cathode electrode-solid electrolyte" with their subsequent fast transportation through solid electrolyte, stimulated by heating to temperature below melting point, field evaporation, into vacuum, and acceleration by external electric field in space between anode electrode and input diaphragm of device.

EFFECT: technical result is higher efficiency of ion source due to generation of ion beams with specified charge and small spatial and energy "blurring", which enables to create compact modular design of source, which does not require use of complex and expensive mass separator.

2 cl, 1 dwg