ANGULAR SPEED SENSOR Russian patent published in 2020 - IPC G01C19/00 

FIELD: measurement.

SUBSTANCE: invention relates to measurement equipment, more specifically to rotary-sensitive devices with oscillating mass. Such devices are used in aircraft stabilization and control systems. Angular velocity sensor comprises an oscillating mass (pendulum) and a measuring element which determines the pendulum rotation in the plane orthogonal to the action plane of forces acting on the sensor base. Additionally, second similar pendulum and measuring element are introduced, as well as adder, instrument amplifier of signals from two measuring elements, operational amplifier and differential amplifier. Both pendulums and both measuring elements are made in a single technological cycle according to MEMS technology. Pendulums in sensor housing are arranged such that rotation of second pendulum is opposite to rotation of first pendulum, at that, outputs of both sensitive angular velocity elements are connected to heteropolar inputs of instrument amplifier and to unipolar inputs of adder, adder output is connected to input of operational amplifier with transmission coefficient C, and the output of the operational amplifier and the output of the instrument amplifier are subtracted on the additionally introduced differential amplifier.

EFFECT: technical result is higher angular velocity sensor accuracy.

1 cl, 1 dwg