FIELD: physics; acoustics.
SUBSTANCE: invention relates to electro-acoustic sensors which can work in high-pressure media. A composite acoustic wave device consists of first and second piezoelectric plates, each having an inner and an outer surface. The plates are aligned by their inner surfaces towards each other. There is a reflecting electrode on at least one of the said outer surfaces. The acoustic wave device forms a resonator on a plane-parallel plate with shear vibration mode across the thickness of the plane-parallel plate. Outer surfaces of the piezoelectric plates are earthed. A cavity can be formed between the piezoelectric plates, where the cavity enables pressure variation and compensation for the after-effect of pressure on measurement accuracy.
EFFECT: reduced sensitivity to pressure fluctuation, possibility of operating at high pressure of the surrounding medium.
23 cl, 10 dwg
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Authors
Dates
2010-02-20—Published
2006-04-20—Filed