VACUUM SPUTTERING PLANT WITH PALLET LASER CLEANING SYSTEM (EMBODIMENTS) Russian patent published in 2020 - IPC B08B7/00 B23K26/00 B29C71/00 B29C33/72 C23C14/56 C23C16/54 

FIELD: technological processes.

SUBSTANCE: invention relates to embodiments of installation for deposition of thin layers with different properties on silicon-based or glass-based plates arranged in pallets from one material. Proposed plant comprises in-series components: unit for loading plates on pallets, inlet sluice and buffer chambers, units of vacuum chambers for sputtering on at least one of sides of plates of thin layers in appropriate process equipment, outlet sluice and buffer chambers, unit for unloading plates with sputtering from pallets, which are combined with control system and automated system for internal transportation of plates in pallets, and also comprises a system for return transportation of pallets without plates outside the vacuum chambers from the unloading assembly of plates with sputtering from the pallets to the loading unit of plates on pallets, wherein pallet reverse transportation system is equipped with pallet passing cycles counter by system, modules of laser pallet cleaning from sputtering from one or two sputtered sides, and is also equipped with pallet position sensors relative to laser cleaning modules, wherein each laser head has a built-in scanner with a scanning region of the beam d = (0.1–0.12) m and a local drawing unit of laser cleaning products located near the cleaning area. At that, in the first embodiment of unit installation each module of laser cleaning of pallets contains one laser head with radiation power of not less than 1.6 kW, is equipped with automatic system of its movement along width of pallet after each passage by modulus of cleaning per step "k", equal to k = d, and local drawing unit is installed with possibility of its movement together with laser head. In the second embodiment of the installation, each module of laser cleaning of pallets contains a group of "n" laser heads located along width of ply "B" at 2 <n <10, each of which has power of radiation of not less than 1.6 kW wherein module is equipped with automatic system of synchronous step-by-step movement along width of ply "B" of all laser heads of group in intervals between their inclusions, and units for local extraction of cleaning products are located near the cleaning area of one or more laser heads of the group and are installed with possibility of movement together with the whole group of "n" laser heads. In one particular case of the second embodiment, the group laser heads are located over the width of the pallet at a distance of the laser beam scanning region of one laser head, wherein system of heads displacement provides their movement along pallets width with pitch "k" equal to k = nd. In another particular case, the group heads are arranged uniformly over the width of the pallet at a distance "b" = B/n from each other, wherein the head movement system provides their simultaneous movement across the width of the pallet part "b" with pitch "k" equal to k = d. In the third embodiment of the installation each module of laser cleaning of pallets contains unit of "N" laser heads at N≥10, radiation power of not less than 1 kW each arranged uniformly over the entire width of the pallet at a distance from each other b = B/N at b≤d. In this case, the total area of scanning beams of the block of "N" laser heads covers the entire width of the plywood "B", therefore, movement of the laser heads over the width of the pallets is not required.

EFFECT: technical result is the creation of a vacuum sputtering system, combined with a system for laser cleaning of pallets, adapted to the process of deposition.

5 cl, 1 dwg