SYSTEMS FOR MEASURING SURFACE TOPOGRAPHY Russian patent published in 2021 - IPC G01B11/30 

FIELD: measurement.

SUBSTANCE: invention relates to measurement of surface topography. Surface topography measurement device comprises an optical element having an inner part including a rigid, transparent optical material. First surface of element includes area with optically transparent surface for image capturing by means of optical element, second surface of element is opposite to its first surface, wherein through said surfaces central axis of optical element passes. Optically transparent elastomer layer is attached to the second surface, the first side of the layer next to the second surface of the optical element has a second refraction index coinciding with the first refraction index of the second surface, and the second side of the layer, which is opposite to the second surface of the optical element, has an optical coating with a predetermined reflecting capacity. Around the inner part of the optical element between the first surface and the second surface, a side wall is formed, which includes one or more light-shaping elements configured to control illumination of the second surface through the side wall. On the outer side of the optical element there is a mechanical key for forced realization of the predetermined position of the optical element in the armouring of the imaging system, wherein the mechanical key includes a radially asymmetric element relative to the central axis to force the unique optical element in the imaging system armature.

EFFECT: technical result consists in enabling simplification of replacement of optical element.

39 cl, 11 dwg