SPUTTERING TARGET FROM SUPERALLOY Russian patent published in 2021 - IPC B22F3/105 C22C19/03 C22C19/07 C23C14/32 C23C14/34 C22C1/04 

Abstract RU 2743536 C1

FIELD: metallurgy.

SUBSTANCE: invention relates to metallurgy, in particular to producing a target from superalloys for the vacuum cathodic arc application of coatings. The target from a superalloy based on nickel powder or cobalt powder for vacuum cathodic arc application of coatings is made of a alloyed powder of a superalloy based on nickel or cobalt containing intermetallic compounds and has a polycrystalline structure with random grain orientation, with the average grain size in the target structure being less than 50 µm and the porosity of the structure being less than 10%. The method for producing a target from a superalloy based on nickel powder or cobalt powder for vacuum cathodic arc application of coatings comprises carrying out spark plasma sintering, wherein the alloyed powder of a superalloy based on nickel or cobalt containing the intermetallic compounds is pressed in a vacuum at a temperature of 1000-1350°C with the simultaneous supply of direct current or pulsed direct current.

EFFECT: enabled is application of coating consisting of elements with different vapour pressure.

10 cl, 3 tbl, 9 dwg

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RU 2 743 536 C1

Authors

Polcik, Peter

Ramm, Juegen

Dates

2021-02-19Published

2018-04-19Filed