METHOD FOR MANUFACTURING SINGLE-CRYSTAL SENSING ELEMENTS FOR HIGH-VOLTAGE OPTICAL MEASURING VOLTAGE TRANSFORMERS Russian patent published in 2021 - IPC H01L41/22 

FIELD: measuring equipment.

SUBSTANCE: invention relates to methods for manufacturing sensitive elements of sensors of physical quantities, in particular to methods for mechanical processing of sensitive piezoelectric elements for optical measuring voltage transformers. The method includes cutting a volumetric piezoelectric crystal into a series of workpieces identical in shape, length and crystallographic orientation, where each of the workpieces has a cylindrical shape and a length of at least 40 mm, an area of the end surfaces of no more than 3 cm² and a crystallographic orientation along the X axis coinciding with the length of the workpiece, subsequent grinding and chemical-mechanical polishing of the end cut surfaces of the workpieces. Grinding and chemical-mechanical polishing of the end surfaces of each of the workpieces is performed using a device that is a cylinder with a coaxial central hole. Before grinding and chemical-mechanical polishing, the workpiece is pre-installed in the central hole of the device and glued to the device. Then, the device and the workpiece are grinded and polished together, and when the pre-set value of flatness, parallelism and roughness of the end surfaces of the resulting sensor element is reached, the device and the workpiece are separated. The device is made of the same piezoelectric material as the workpiece, which has the same crystallographic orientation X.

EFFECT: achievement of high flatness-parallelism of the end surfaces of the workpieces.

6 cl, 1 dwg