METHOD OF INDUSTRIAL PRODUCTION OF PRECISION PIEZOELECTRIC SENSING ELEMENTS Russian patent published in 2017 - IPC H01L41/22 G01L23/10 

FIELD: measuring equipment.

SUBSTANCE: each sensor is formed from three sensing elements of identical length. Each sensor element is cut out in the form of a rectangular bar of heat-treated single monocrystals of lanthanum gallotantalate. Each sensing element has a crystallographic orientation (22. 0), the length of the sensing element coincides with the direction corresponding to the effect of dynamic pressure. Sensing elements are manufactured in a single technological cycle in three stages. In the first stage, the lanthanum gallotantalate crystal is cut along the crystallographic polar direction X with a pitch which specifies the thickness of the sensing element into the preforms of the first type, having cutting planes of the crystallographic orientation (22. 0), and grinded to a predetermined thickness and roughness. In the second stage, the obtained preforms of the first type with cutting planes X are cut along the Y direction with a pitch which specifies the length of the sensing element along the axis <0.10> into the preforms of the second type. In the third stage, the resulting preforms of the second type with cutting planes Y are cut along the Z direction with a pitch which specifies the width of the sensing element along the axis <00.1> into the preforms of the third type. Before performing the second and third stages, the preobtained preforms of the first type and the second type are glued into blocks and the obtained blocks are subjected to double-sided grinding and polishing until a predetermined size of the sensing element is achieved along the direction <01.0> and the direction <00.1>. After performing the second and third cutting stages, the mentionted blocks of the preforms of the first and second types are unglued and washed in an organic solvent. In the third stage, the final product is obtained in the form of a series of sensing elements of identical length, each of which has a crystallographic orientation (22. 0).

EFFECT: possibility of obtaining microminiature sensors with identical geometric dimensions with a minimum linear dimension spread on an industrial scale.

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