FIELD: semiconductor devices testing.
SUBSTANCE: invention relates to a device for electrical testing of semiconductor devices. An analog switch for measuring sources with tested semiconductor devices consists of one or several identical functionally complete switching units. Each switching unit consists of housing, a rear panel board, a contacting device board, and a switching board. Each switching unit provides switching between a group of current or voltage measuring sources connected to the rear panel connectors via a relay and a semiconductor device under test installed on the contacting device board. In this case, the switching of the measuring sources with the tested semiconductor devices is carried out on the basis of a group of at least four buses located on the switching board. In this case, each bus consists of two power and two measuring signal lines corresponding to the outputs of the source-measuring.
EFFECT: invention provides the ability to test high current and voltage devices.
4 cl, 2 dwg
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Authors
Dates
2021-07-15—Published
2020-11-18—Filed