GROWING OF NANOTUBES FROM FREE ATOMS Russian patent published in 2021 - IPC C01B32/162 C01B32/164 B82B3/00 B82Y40/00 

FIELD: nanotechnology.

SUBSTANCE: invention relates to nanotechnology, micro- and nanoelectronics, space and military technology, and can be used in production of materials with increased strength, in manufacture of micro- and nanoscale integrated circuits or transistors, receivers, field emitters, a "space elevator". The structure for growing nanotubes is not equipped with a waveguide and comprises a substrate with the front and rear sides; raw material atoms located over the front side and capable of being released and migrating as a result of absorption of electromagnetic emission; a catalytic layer providing the ability to form at least one nanotube of raw material atoms over the front side of the substrate. The raw material atoms are selected from carbon, silicon, boron and nitrogen, aluminium and nitrogen, and gallium and nitrogen, and can be located in a layer of raw material located over the front side of the substrate or in a reservoir of raw material atoms. The material of the catalytic layer is selected from iron, nickel, cobalt, copper, gold, silver, platinum, palladium, manganese, chromium, tin, magnesium, aluminium, yttrium, vanadium, molybdenum, rhenium, or alloys thereof. The substrate can additionally comprise a source of electromagnetic emission including a light emitting diode or laser, and an electromagnetic emission amplifier. The described structure can additionally comprise a layer including both raw material atoms and a catalyst. To produce the described structure, a raw material layer is placed over the front side of the substrate, and a catalytic layer is placed on the front side thereof. If a source of electromagnetic radiation and an amplifier are present, they are formed under the raw material layer.

EFFECT: invention allows to significantly reduce the temperature whereat long nanotubes are grown, due to the use of gas-phase deposition and hot gaseous carbon precursors not being required therein, and also to improve the quality of the grown nanotubes by eliminating adverse side reactions and formation of amorphous carbon.

15 cl, 9 dwg