FIELD: three-coordinate measurement systems.
SUBSTANCE: group of inventions relates to a three-coordinate target 200, a three-coordinate measurement system, a system for three-coordinate optical measurement, and a method for three-coordinate optical measurement of the location of the first object relative to the second. The three-coordinate target, which can serve as a base for counting positions, contains on its working face 202: the first structure 210, which forms a flat base surface 212, divided at least into a first section 214, the surface of which has diffuse reflection properties, and a second section 216 , the surface of which has the properties of mirror reflection, and the second section 216 is divided into a number of local zones 217 located on the first section 214, and the second structure 220 containing an inclined surface 222, which is essentially flat and inclined relative to the specified flat base surface, while the inclined the surface contains relief elements or mirror elements that are distributed evenly over the sloped surface.
EFFECT: one measurement per exposure is provided.
28 cl, 6 dwg
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Authors
Dates
2023-05-22—Published
2018-11-29—Filed