GROUP METHOD OF MANUFACTURING OF STRAIN-RESISTOR POWER SENSORS Russian patent published in 2023 - IPC H01L21/48 G01L1/22 

Abstract RU 2803391 C1

FIELD: instrumentation.

SUBSTANCE: manufacture of a group method of accurate, noise-immune strain gauge force sensors with parallelogram mechanisms. Through holes are made parallel to the axis of symmetry of the beams with the same pitch in the block of blanks of elastic elements, on their basis - through U-shaped grooves, forming monolithic parallelogram mechanisms consisting of two parallelograms and force-receiving units are made. A matrix of strain gauges is made, making windows in it to release the force-receiving nodes, after which it is glued onto parallelogram beams, and the block is divided into separate sensors. Strain gauges freed after the creation of windows, after their separation in pairs or discretely, are used to create strain gauge sensors with any types of elastic elements.

EFFECT: enabling the production of strain-resistive sensors based on parallelogram mechanisms, consisting of two identical monolithic parallelograms, in a group way; interference immunity from parasitic forces, bending and torques, stability and reliability of high-precision sensors.

2 cl, 2 dwg

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RU 2 803 391 C1

Authors

Tsyvin Aleksandr Aleksandrovich

Dates

2023-09-12Published

2023-02-02Filed