FIELD: thin films.
SUBSTANCE: method for producing thin films (0.1-100 mcm) of complex oxide systems that can be used in the manufacture of various electrochemical devices: solid oxide fuel cells, solid-state batteries, etc. The effect is achieved by the fact that formation of films occurs by spraying an aerosol with a dry nanocrystalline powder with a crystallite size of up to 100 nm, collected into soft agglomerates up to 100 mcm in size, onto a substrate under low vacuum (100-1000 Pa) and room temperature.
EFFECT: increased density, density uniformity, ionic and/or electronic conductivity of the formed films of complex oxide systems, reduced sintering temperature, and increased deposition productivity.
1 cl, 4 dwg, 3 ex
