FIELD: synthesis of nano-diamonds or ultra-dispersion diamonds.
SUBSTANCE: nano-diamond powders are produced in UHF plasma of carbon-containing gas steams, for example, ethanol, on substrate having temperature at which polymer-like hydrocarbon film is simultaneously precipitated onto it. Synthesis of nano-diamond powders in nano-porous hydrocarbon matrix, preventing their unitizing during long storage, is realized by simplified technology, compatible with common technological processes of micro-electronic industry, capable of control over their dimensions and concentration.
EFFECT: increased efficiency.
2 cl
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