METHOD FOR ASSEMBLING MICROASSEMBLY OF VACUUM DEVICE Russian patent published in 2023 - IPC H01J7/18 H01J9/02 

FIELD: electrical engineering.

SUBSTANCE: invention may be used in the development of the design of electric vacuum devices and methods for their assembly, as well as in the manufacture of vacuum microassemblies with improved functional performance. In the method of assembling a microassembly of a vacuum device (MAVD), a cutting element in the form of a punch, which is a triangular spike with sharp edges converging to the top, is fixed on the inner surface of the housing cover of the MAVD, made in the form of a hollow cylinder. Then the gas absorption module (GA) body, made in the form of a disk-shaped part with a cover with a membrane in the centre of the cover, formed from a material that is destroyed when exposed to a punch, is placed in the cavity of the MAVD housing cover and is rigidly fixed in it at a distance between the mentioned GA cover and the punch equal to its stroke in direction towards the membrane until it comes into contact with it, combining the outer contour of the GA with the internal contour of the MAVD body cover with the possibility of moving the punch with the MAVD body cover under the influence of external force, calculated from the condition of local destruction of the membrane with the formation of cuts radially diverging from the place of the breakthrough, and with the possibility of making reverse stroke of the punch for free gas exchange between the cavities of the GA and MAVD, and finally connect the base of the MAVD housing with the functional elements of the device installed on it with the cover of the MAVD housing using laser welding.

EFFECT: increase in the efficiency of the activation process of the gas absorption module by improving the absorption of harmful gases in the cavities of the electric vacuum device under conditions of mass and size limitations of the assembly.

1 cl, 1 ex, 2 dwg