MICRO-ASSEMBLY OF VACUUM DEVICE AND METHOD OF ITS ASSEMBLY Russian patent published in 2023 - IPC H01J7/18 H01J9/02 

FIELD: electrical engineering.

SUBSTANCE: gas absorber located in the cavity of the vacuum device is a gas absorbent module (GAM). The GAM body is made collapsible in form of a hollow disk-shaped part with a cover with a gas-absorbing porous structure placed in it, made up of two coaxially arranged annular elements. On the lower base of the GAM housing and on the inner surface of the GAM housing cover, two spiral-shaped single-turn parts are fixed, forming a channel for gas exchange in the internal cavity of the GAM housing. The method for assembling the micro-assembly of the vacuum device provides for chemical cleaning of the GAM body elements, treatment in organic solvents, and soaking in isopropyl alcohol vapor, after which high-temperature annealing in a vacuum furnace of the GMA elements (spiral-shaped single-turn parts and the GAM body) is carried out.

EFFECT: increase of efficiency of stabilization of the gaseous medium in the cavity of the vacuum device (VP) during its storage and operation.

2 cl, 1 ex, 2 dwg