FIELD: laser systems.
SUBSTANCE: means for cleaning and cooling optical components of laser systems from dust. The method includes creating a flow of cleansing air, ionizing said flow, directing the resulting ionized flow onto the surface of the mirror and blowing it, taking in said air flow after blowing using an intake having an electrical charge that is opposite to the charge of the ions in said flow. Using the air flow, controlled cooling of the cleaned mirror surface with non-ionized cold air is also carried out, with its flow rate and temperature regulated depending on the heating temperature of the mirror surface.
EFFECT: increase in the durability of the structure.
3 cl, 1 dwg
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Authors
Dates
2023-12-26—Published
2023-06-07—Filed