FIELD: machine building.
SUBSTANCE: invention relates to a method of cleaning optical elements from dust and a system for its implementation. System comprises connected with pipes (10) and (11) air stream cleaning device (15) with compressor (14), airflow ionization device (2) and optical elements blowing device (5) by positive or negative ions flow 9. Intake of ions flow is charged with opposite charge.
EFFECT: technical result: improved cleaning quality.
7 cl, 1 dwg
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Authors
Dates
2020-10-06—Published
2019-12-29—Filed