METHOD OF MAKING TARGETS FOR DEPOSITING THIN SUPERCONDUCTING LAYERS BY LASER PULSED SPUTTERING Russian patent published in 2024 - IPC C23C14/08 C23C14/34 

FIELD: technological processes.

SUBSTANCE: invention relates to a method of making targets for depositing thin superconducting layers Re_aBa_bCu_cO_7−x, where Re is a rare-earth metal, by laser pulsed sputtering. Following stages are carried out. Performing stage (A) of preparation of raw material components of target by weighing and mixing powder raw material, containing rare-earth metal oxide, barium-containing salt and copper oxide in molar ratio, providing a given composition of Re_aBa_bCu_cO_7−x; (B) synthesis of a superconducting target material of a given composition from the prepared raw material components; (C) crushing the synthesized superconducting material and its subsequent grinding to obtain a superconducting powder; (D) moistening the superconducting powder for subsequent granulation by mixing the superconducting material from step (C) with a binder; (E) granulating the superconducting powder to obtain a superconducting molding powder; (F) semi-dry molding of granulated superconducting molding powder by uniaxial isostatic pressing to produce target workpieces; (G) drying of target workpieces and (H) annealing of workpieces with production of targets. At steps (B), (D), (E), (F), (G) and (H) quality control is performed to detect defects. In case of detection of defect at stage (B), its processing is carried out by repeated carrying out of stage (B) to obtain said superconducting material of given composition. In case of detection of defects at least at one of stages (D), (E), (F), (G) and (H) it is processed by thermal treatment of waste for removal of binder. All processed waste is returned to stage (C) and stages (C)–(H) are repeated.

EFFECT: non-waste production of targets with observance of all quality requirements during their operation.

11 cl, 2 ex