FIELD: physics.
SUBSTANCE: invention relates to a laser scanning device which irradiates and scans surfaces of objects with laser beams for processing or modification thereof. Device comprises a laser beam output unit which emits a laser beam, a polyhedral mirror which causes reflection of the laser beam emitted from the laser beam output unit, and an optical system which directs the laser beam reflected in the polyhedral mirror to the surface of the object. Axis of rotation of the polyhedral mirror is parallel to the surface of the object and is parallel to the direction in which scanning by the laser beam takes place or is oriented in the direction crossing the scanning direction by the laser beam, if seen in the direction of the normal to the surface of the object. In the case where the effective scanning length Ls is determined as the sum of the laser beam diameter on the surface of the object and the length of the laser beam scanning on the surface of the object along the direction of the rotation axis of the polyhedral mirror as the polyhedral mirror rotates, and the width of the laser scanning device along the direction of the axis of rotation of the polyhedral mirror is denoted as W, the relation W < Ls is satisfied. Optical system includes a reflecting mirror which reflects the laser beam reflected in the polyhedral mirror to change the scanning direction of the laser beam, a focusing mirror which reflects the laser beam reflected in the reflecting mirror to an object, and a rotary element which supports the reflecting mirror and the focusing mirror and rotates along a plane including the optical path of the laser beam between the reflecting mirror and the focusing mirror.
EFFECT: providing creation of thermal stresses or grooves, which improve magnetic losses, with reduction of width occupied by the device, and absence of gaps between scanning lines.
6 cl, 24 dwg
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Authors
Dates
2024-11-11—Published
2022-03-30—Filed