ELECTROCHEMICAL ACTUATOR Russian patent published in 2025 - IPC H01H61/00 

FIELD: microstructure technologies.

SUBSTANCE: invention relates to microelectromechanical systems, namely to membrane actuators for laboratories on a chip, micromotors and microrobotic systems. Electrochemical actuator includes a micromechanical part in the form of a working chamber with two electrodes, filled with an electrolyte and a closed membrane, and a control device comprising a microcontroller, digital-to-analogue converter, preamplifier, power amplifier, current transformer, current-to-voltage converter, rectifier and integrator, and additionally comprises an integrator, voltage divider and comparator. Electrodes are made of platinum group metal or have platinum group metal coating. Output signal of the rectifier is supplied to two parallel connected integrators, the output signals of which are supplied to a comparator. First integrator is directly connected to the positive input of the comparator and has a shorter integration time than the second integrator, and the second integrator is connected to the negative input of the comparator through a voltage divider. Output signal of the comparator is transmitted to the microcontroller. Presence of two integrators, a voltage divider and a comparator in the control device allows it to interrupt a series of pulses upon the onset of a microbubble explosion in the working chamber.

EFFECT: improved performance of the electrochemical actuator due to the possibility of working with a wide range of movement.

5 cl, 10 dwg