METHOD OF ELECTROCHEMICAL ACTUATOR OPERATION Russian patent published in 2024 - IPC G01L3/00 

FIELD: microelectromechanical systems.

SUBSTANCE: invention relates to microelectromechanical systems, namely to methods of electrochemical actuator operation. Alternating-polarity voltage pulses supplied to the electrode create nanobubbles in the actuator working chamber. At sufficiently high amplitude of pulses, concentration of nanobubbles reaches a critical value. They merge into a microbubble, which explodes and expands to a large size. Due to this, a large movement of the actuator membrane is achieved. Method involves earthing of one of the electrodes, supplying to the second electrode a series of voltage pulses of various shapes of alternating polarity with amplitude exceeding the threshold voltage, at which a microbubble explosion occurs in the actuator working chamber. Upon reaching the explosion, the series of pulses is interrupted. Interruption is carried out at the onset of the current flowing through the electrodes. Threshold voltage is pre-determined by successive supply of series of pulses with amplitude increasing from series to series to explosion of microbubble. Voltage pulses are supplied with duration selected from range of 0.1 mcs to 5 mcs.

EFFECT: improved operation of the electrochemical actuator.

2 cl, 13 dwg