ION SOURCE Russian patent published in 1995 - IPC

Abstract SU 1402185 A1

FIELD: generation of intensive ion beams. SUBSTANCE: ion source has equipotential hollow cathode, ring anode, magnetic system, multiaperture extraction system and additional cavity. Working gas is bled into ion source through additional cavity. Evacuation occurs through multiaperture extraction system. Pressure in additional cavity located below equipotential cathode is by a factor higher than in hollow cathode. Thanks to high pressure (10^-1 Torr) in additional cavity main discharge burns between anode and additional cavity with low burning voltage. Main generation of ions takes place in part close to anode. Ions are extracted from hollow cathode through multiaperture extraction system. EFFECT: prolonged service life, increased electric efficiency of ion source based on discharge with cold cathode concentrated in crossed electric and magnetic fields. 1 dwg

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SU 1 402 185 A1

Authors

Nikitinskij V.A.

Lizin E.I.

Gaponenko A.T.

Zhuravlev B.I.

Dates

1995-04-10—Published

1985-12-24—Filed